Product Offering:
- Pall Gas, Chemical and DI Water Filters
- AP Tech Regulators and Valves
- Setra Pressure Transducers and
- Manometers
- Trebor Teflon Pumps and DI Water Heaters
- Unit MFC's (Mass Flow Controllers)
- McMillan Flow Meter and Flow Controllers
- Thornton PH and Conductivity Monitors
- Pneumatic Products CDA Dryers and a
- variety of other products that surround your
- high-end Semiconductor Processes
Services
- On-Site Trebor Warranty and Rebuild Svc.
- Gas Purification Division
- Start-up, warranty and maintenance for all
- brands of heat reactivated and heatless
- dryers.
- Consignment Inventory Programs
Product News
Pall PhotoKleen™ EZD-3 Filter Assembly
Pall Lithography Filters
- PhotoKleen EZD-3
- Capsule style design ideal for i-line DUV, Top and Bottom anti-reflective coatings and Spin-on low-K ILD material.
- Minimizes hold-up volume (40mL)
- One step quick filter replacement
- Minimized dead space
- Reduces chemical waste during filter start-up and change-out
 Pall Photoresist Paper (PDF: 150 KB)
Pall PhotoKleen EZD-3 (PDF: 69 KB)
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